Logo - Eden Lab

PLASMA THERM – Singulator® MDS-100, MDS-300

Plasma-Therm’s Singulator® models MDS-100 and MDS-300 are the first volume-production-ready plasma singulation systems.

Singulator® systems deliver unique benefits compared to traditional dicing techniques, especially for thin and ultra-thin wafers:

  • Smooth sidewalls
  • No lateral damage
  • Improved die strength
  • Street size as small as 10μm and less
  • Dicing of non-rectangular dies (rounded corners, key shape, etc.)

Tape-frame cassette handling system

  • Supports industry-standard dicing tape with plastic or metal frames
  • Load two cassettes with up to 25 frames each
  • Continuous operation for 4-, 6-, 8-inch wafers on 8-inch tape frames, and 12″ wafers on tape frames
  • Integrated laminar flow and anti-static bars for operation in backend environment

High-rate process chamber

  • Yield-enhancing, proprietary plasma source
  • Highest throughput — up to 3,000 mm/sec dicing speed equivalent

Process control

  • Integrated endpoint technology with EndpointWorks™ software compensates for non-uniform substrate thickness

On-tape process extendibility

  • TSV reveal
  • Wafer thinning
  • Stress relief

Enhanced productivity with Cortex® control system

  • Automatic data logging and charting
  • Automated maintenance scheduler
  • Factory system integration (SECS/GEM)

Why Choose Eden Lab

Australian Company
Top Support
Full Spectrum of Products
Years of Experience

Fast Shipping

Ready to Ship Freeze Dryers

Top Support

Local Dedicated Support

Peace of Mind

Covered By Australian Law