Telemark – Customized UHV rectangle chamber

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Material：S.S.304
Surface: Electro-polished
Spec: UHV CF200 cylinder chamber
Leakage rate: 2 x 10-10mbar.l/sec
Operation pressure<7.5 x10-10 torr
When the total pressure is below 1 x10-9 torr, partial pressure of above 45amu is <0.1%.

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