Our Labline series is crafted with versatility and flexibility in mind, making it particularly well-suited for process development and pilot-line production. Its unique design allows for the accommodation of a diverse range of substrates in various types and sizes, accommodating different materials seamlessly.
All SparkNano products boast a modular design, suitable for both thermal and plasma-enhanced Spatial ALD. When paired with plasma-enhanced Spatial ALD, we provide the added benefit of maskless patterned deposition.
The Labline series is offered in two sizes, catering to maximum 6-inch and maximum 12-inch substrates. This series seamlessly integrates top-notch Spatial ALD film depositions with the system’s adaptability, ensuring it can meet the demands of future needs and applications.
Labline 6″
Labline 6″
Technical features
Flat substrates, such as polymer and metal foils, wafers, glass, and porous substrates, can be easily accommodated by our Labline series. The design is specifically tailored to handle a wide array of materials, offering versatility and adaptability for different substrate types and sizes. Whether you are working with flexible polymer and metal foils or traditional wafers and glass, our Labline series ensures efficient and precise processing. The system’s capabilities extend to porous substrates, making it a comprehensive solution for various deposition needs on flat surfaces.
Labline 6″
Substrate size
A complimentary envelope measuring 175 mm x 215 mm x 5 mm is provided. This envelope is designed to accommodate any flat substrate when used in conjunction with a substrate-specific holder.
Labline 6″
Process
Spatial ALD can be enhanced through both thermal and plasma processes.
Labline 12″
Labline 12″
Technical features
The Labline series is engineered to seamlessly handle flat substrates, including polymer and metal foils, wafers, glass, and porous substrates. Its versatile design accommodates a diverse range of materials and substrate types, providing flexibility for different sizes and shapes. Whether you are working with flexible polymer and metal foils, traditional wafers and glass, or porous substrates, the Labline series is equipped to deliver precise and efficient processing, making it an ideal solution for a variety of deposition requirements on flat surfaces.
Labline 12″
Substrate size
A complimentary envelope measuring 320 mm x 360 mm x 5 mm is at your disposal. Within this spacious enclosure, any flat substrate can be securely placed using a substrate-specific holder.
Labline 12″
Process
Spatial ALD can be enhanced through either thermal or plasma processes, providing versatile options for deposition techniques.
