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Leybold – M-UHV Systems

Modular, turnkey, versatile

Analysis processes and experiments require an ultra-high vacuum system to precisely investigate the structure of surfaces. To enable the users to concentrate on their experiments and investigations, they rely on Leybold systems. Because they perform at accurate vacuum level and require little maintenance work. Our M-UHV systems are modular, turnkey platforms which satisfy these requirements and are ideal for these applications.

Typical research applications include:

  • Surface Science
  • Catalysis
  • Metallurgy
  • Photovoltaics
  • Semiconductor
  • Energy
  • Combinatorial Materials Studies


The M-UHV system is an excellent platform for the integration of various UHV analytical techniques including:

  • X-ray photoelectron spectroscopy (XPS)
  • Auger electron spectroscopy (AES)
  • Energy loss spectroscopy (ELS)
  • Ultra-violet photoelectron spectroscopy (UPS)
  • Scanning electron microscopy (SEM)
  • Scanning Auger microscopy (SAM)
  • Temperature programmed desorption (TPD) / Temperature programmed reaction spectroscopy (TPRS) / Thermal desorption spectroscopy (TDS)
  • Reflection high-energy electron diffraction (RHEED)
  • Ion scattering spectroscopy (ISS)
  • Secondary ion mass spectroscopy (SIMS)
  • Scanning tunnelling microscopy (STM)
  • High-resolution electron energy loss spectroscopy (HREELS)
  • …and more


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