Our UHV all metal variable leak valves are the reliable solution for all applications in ultra-high vacuum. The innovative design and rotatable CF flanges allow a convenient handling and an easy installation.
The reliability of the valve is achieved by the use of optimal sealing materials. The silver-coated sealing with its very long service life is maintenance-free at more than 20.000 cycles.
Advantages to the User
- Very reliable sealing
- Maintenance-free for over 20.000 cycles
- Coated spindle, no lubrication necessary
- Very high lifetime due to the coated metal sealing
| Technical Data | ||||
|---|---|---|---|---|
| UHV-All-Metal Variable Leak Valve | ||||
| Connection flange | DN | 16 CF-R | ||
| Position indication | Linear scale – scale ring | |||
| Leak rate to the outside seat “closed position” |
mbar x l/s mbar x l/s |
≤ 1 x 10-10 ≤ 1 x 10-10 |
||
| Molecular conductance | l/s | 0.05 | ||
| Adjustable gas flow [air, 1 bar, RT] | mbar x l/s | 1 x 10-10 – 500 | ||
| Dead volume seat port side port |
cm3 cm3 |
2.7 1.1 |
||
| Pressure range | bar (abs.) | UHV to 10 | ||
| Test pressure | bar | 1 | ||
| Differential pressure | bar | ≤ 10 | ||
| Max. differential pressure at opening | bar | ≤ 10 | ||
| Cycles until first service | 20.000 | |||
| Bake-out temperature open closed actuator |
°C °C °C |
≤ 300 ≤ 300 ≤ 300 |
||
| Heating and cooling rate | °C/h | ≤ 60 | ||
| Material body diaphragm |
1.4943, AISI 660 / 1.4404, AISI 316 L 1.4310, AISI 301, gold plated |
|||
| Mounting position | any | |||
| Radiation resistance | Gy (rad) | 108 (1010) | ||
| Turns from open to close | 22 | |||
| Weight | kg (lbs) | 0.94 (2.07) | ||
