Proven R2R system enables ultra-high-volume Spatial ALD on flexible foils, ensuring efficient, continuous, and reliable production for diverse applications.
The streamlined design facilitates high-speed deposition on flexible substrates, including polymer and metal foils.
The system can be configured for thermal or plasma enhanced Spatial ALD to match the desired material to be deposited. The web width, web speed and deposition materials will be ready to be adopted according to the overall customer application. The standard web-with is ranging from 300 to 2000 mm and a web speed up to 60 m/min.
SparkNano uses proven technology used for other high throughput energy applications. Additionally, we offer optional integrational designs for line integration and for example interleafs.
Key features Omega Series
Omega Series
Substrate types
Polymer or metal foils
Omega Series
Substrate size
The foil width ranges from 300 mm to 2000 mm. Maximum foil thickness depends on material properties, considering both minimal and maximal web tension and drum diameter.
Omega Series
Process
Both thermal as plasma enhanced s-ALD
