The “ultra” compact 508, 1.5cc ebeam source (e-gun) is UHV compatible and is supplied by itself or installed on a 2.75” CF flange in a horizontal orientation. The 508 source is perfect for refractory metals and high melting point materials in MBE environments.
The model 509 is a 4cc UHV source with a 270° emitter. It is installed on a 4.5 or 6 inch CF flange in a vertical orientation for installations where effusion (Knudsen cell) K-cells are being used.
Features
- Mounted on 4.5” or 6” CFF for direct replacement of K-cells
- No beam sweep
- 1.5cc or 4cc pocket
- 5kV max.
- Shutter or Dual HV feedthru can be mounted on 6” CFF
