Vellum is specifically designed for sheet-to-sheet (S2S) applications, catering to substrates ranging from 0.5 x 0.5m to 1 x 1.5m in size. It is adept at accommodating various substrates, including metal or polymer foils, wafers, glass, and porous substrates. The system is geared towards achieving real production throughput of up to 20 substrates per minute. With compatibility for a diverse range of deposition materials and temperatures, Vellum ensures flexibility in the deposition process.
The system’s substrate flow handling and inline integrated setup are meticulously designed to meet the overall system requirements. The Vellum product line stands out as a fully automatic processing platform, emphasizing high throughput capabilities.
Key features Vellum Series
Vellum Series
Substrate types
Flat substrates, such as polymer and metal foils, wafers, glass, and porous substrates, are well-suited for processing with Vellum. This platform is tailored for sheet-to-sheet (S2S) applications, accommodating substrates ranging from 0.5 x 0.5m to 1 x 1.5m. Its versatility extends to various materials, including metal or polymer foils, traditional wafers, glass, and porous substrates. Vellum ensures efficient throughput, handling up to 20 substrates per minute, and offers compatibility with a diverse array of deposition materials and temperatures. The system’s design prioritizes seamless substrate flow handling and an integrated setup, making it a comprehensive solution for high-throughput, fully automatic processing.
Vellum Series
Substrate size
0,5×0,5 to 1,0×1,5m
Labline 6″
Process
Spatial ALD can be enhanced through both thermal and plasma processes.
